User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

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Hlavní autor: Lowney, J. R. (Jeremiah Ralph), 1946-
Korporativní autor: National Institute of Standards and Technology (U.S.)
Další autoři: Marx, Egon
Médium: Kniha
Jazyk:English
Vydáno: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1994.
Edice:Semiconductor measurement technology
NIST special publication ; 400-95
Témata:
Scanning electron microscopy > Computer programs > Handbooks, manuals, etc.
Electrons > Scattering > Mathematical models > Computer programs > Handbooks, manuals, etc.
Monte Carlo method > Computer programs > Handbooks, manuals, etc.

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